Author Affiliations
Abstract
1 Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei 230026, China
2 Advanced Laser Technology Laboratory of Anhui Province, Hefei 230026, China
The compact, sensitive, and multidimensional displacement measurement device plays a crucial role in semiconductor manufacture and high-resolution optical imaging. The metasurface offers a promising solution to develop high-precision displacement metrology. In this work, we proposed and experimentally demonstrated a two-dimensional displacement (XZ) measurement device by a dielectric metasurface. Both transversal and longitudinal displacements of the metasurface can be obtained by the analysis of the interference optical intensity that is generated by the deflected light beams while the metasurface is under linearly polarized incidence. We experimentally demonstrated that displacements down to 5.4 nm along the x-axis and 0.12 µm along the z-axis can be resolved with a 900 µm × 900 µm metasurface. Our work opens up new possibilities to develop a compact high-precision multidimensional displacement sensor.
metasurface transversal and longitudinal displacement measurement 
Chinese Optics Letters
2024, 22(2): 021202
作者单位
摘要
1 中国科学技术大学国家同步辐射实验室,安徽 合肥 230029
2 中国科学技术大学光学与光学工程系,安徽 合肥 230026
离子轰击固体表面诱导的纳米结构具有小周期(10~100 nm)、大面积、准周期的特点。利用氩离子轰击在减反膜上制备出横向特征尺寸在100 nm附近、横向周期性与纵向连续性逐步明显的准周期纳米波纹结构。为了增大表征面积,利用极紫外散射法表征了上述自组织纳米波纹的形貌特征。结果显示,面内和锥角模式的极紫外散射法所获得的样品横向和纵向形貌特征,均能够与原子力扫描显微镜所获得的样品形貌特征相对应,这初步说明了此方法表征准周期纳米波纹结构基本形貌特征的可行性,为后续的定量分析提供基础。同时,利用极紫外同步辐射光表征的自组织纳米结构面积达到了mm2量级,将合肥光源计量光束线的表征范围拓展到自组织纳米结构,这也为未来探索极紫外光刻掩模的散射表征等研究提供参考。
极紫外 散射测量 同步辐射 离子轰击 自组织纳米结构 准周期 
光学学报
2022, 42(19): 1936001
Author Affiliations
Abstract
1 Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei 230026, China
2 USTC Center for Micro and Nanoscale Research and Fabrication, University of Science and Technology of China, Hefei 230026, China
3 Advanced Laser Technology Laboratory of Anhui Province, Hefei 230026, China
Phase carried by two orthogonal polarizations can be manipulated independently by controlling both the geometric size and orientation of the dielectric nanopost. With this characteristic, we demonstrate a novel multifunctional metasurface, which converts part of the incident linearly polarized light into its cross-polarization and encodes the phase of the two orthogonal polarizations independently. A beam splitter and a bifocal metalens were realized in a single-layer dielectric metasurface by this approach. We fabricated the bifocal metalens and demonstrated that two focal spots in orthogonal polarizations can be separated transversely or longitudinally at will. The proposed approach shows a new route to design multifunctional metasurfaces with various applications in holography and three-dimensional display.
multifunctional metasurface polarization conversion beam splitting bifocal metalens 
Chinese Optics Letters
2021, 19(5): 053601
作者单位
摘要
中国科学技术大学光学与光学工程系安徽省光电子科学与技术重点实验室, 安徽 合肥 230026
设计一种支持多模式的金属-介质-金属纳米天线阵列结构,分析结构中的模式特性及其调控的发光过程。利用时域有限差分的方法模拟该结构的透射谱和电场分布,分析结构中局域表面等离激元模式和磁等离激元共振模式的特性以及激发光偏振调控的模式变化。将偶极子光源放在介质层中,模拟该天线阵列结构调控荧光分子的发光过程。结果表明:荧光分子的辐射和非辐射衰减速率增强因子、量子效率以及偏振特性受到了所提结构模式的有效调控;在一定波长范围内改变激发光的偏振方向可以对发光谱进行调谐。
物理光学 局域表面等离激元 磁等离激元 时域有限差分 荧光辐射 
光学学报
2020, 40(4): 0426001
作者单位
摘要
南京航空航天大学机电学院, 江苏 南京 210016
在采用线结构光模式进行非接触式测量中, 光条纹中心能否精确提取将直接影响视觉检测系统的精度。当激光条纹宽度变化、灰度分布不均匀时, 一般算法提取出的中心点波动性较大, 对此提出了一种激光条纹中心自适应提取的优化算法。该算法首先确定图像的光条纹区域, 并通过边界检测计算光条各截面宽度, 然后采用自适应宽度的二次加权灰度重心法求取光条中心, 再根据斜率阈值对提取出的中心点进行均值优化, 最终获得精确的亚像素级光条中心坐标。实验结果表明, 与传统算法相比, 该优化算法明显提高了光条中心提取的精确性和稳定性, 中心点坐标的均方差仅为0.1pixel。
激光条纹 图像处理 自适应 中心提取 均值优化 评价指标 laser stripe image processing self-adaptive center extraction average optimization evaluation index 
应用激光
2019, 39(6): 1028
作者单位
摘要
中国科学技术大学光学与光学工程系,光电子科学与技术安徽省重点实验室, 安徽 合肥 230026
通过数值模拟研究了基模高斯光场(HG00)和高阶厄米-高斯光场(HG10)与 亚波长单金属狭缝之间的相互作用。发现在相同的错位耦合下, HG10光场可以获得明显的表面等离子体(SPP)非对称激发。 在此基础上提出了亚波长金属狭缝对结构。数值模拟显示, HG10模场与亚波长金属狭缝对在适当的错位耦合下可以获得更加 显著的SPP非对称激发效应。通过优化双狭缝间距和入射光波长,最大分束比达到2.6。设计优化过程中采用时域有限差分法进行 数值模拟。金属狭缝结构简单易制备,且SPP的非对称激发具有动态可调的特性,在微纳光子集成和纳米测量方面具有潜在 的应用价值。
微纳光学 表面等离子体 非对称激发 动态调控 时域有限差分法 micro-nano optics surface plasmon polariton unidirectional excitation dynamic regulation finite-difference time domain 
量子电子学报
2019, 36(5): 545
作者单位
摘要
中国科学技术大学光学与光学工程系,光电子科学与技术安徽省重点实验室, 安徽 合肥 230026
基于亚波长纳米单元(超原子)的超表面结构革新并极大丰富了光场调控技术,从理论 上研究并设计具有独特性质和功能的超表面结构在光场调控研究中具有重要价值。利用极化率张量理论计算了对称和非对称 金属-介质-金属(MDM)正三棱柱超原子的诱导电响应、磁响应、磁电响应和电磁响应,设计出偏振无关的周期性MDM正三棱柱 超表面,分别通过时域有限差 分(FDTD)仿真模拟和理论计算的方法得到MDM超表面的透射谱和反射谱,两者能符合得很好。并发现对称超表面结构的反射谱 对入射光传播方向不敏感,而非对称超表面结构的反射谱在共振频率附近对入射光传播方向有依赖。研究结果对利用不对称超 原子设计具有任意反射系数的超表面具有指导作用。
微纳光学 反射率差 极化率张量 超表面 共振 micro-nano optics reectance difference polarizability tensors metasurface resonance 
量子电子学报
2019, 36(5): 532
作者单位
摘要
中国科学技术大学光学与光学工程系, 安徽省光电子科学与技术重点实验室, 安徽 合肥 230026
金属尖端对于表面拉曼散射有增强效果,尖端的角度对表面增强拉曼散射(SERS)的 影响很少有定量报道。为研究尖端角度大小与SERS的关系,利用数字微镜设备(DMD)进行无掩 模投影光刻制备了4组不同尖端角度的样品,分别为30°、60°、90°、120°。测量了样品对 应的SERS谱,研究了金属尖端角度对SERS的影响。结果表明: 锐角具有更好的表面增强拉曼散射效果,角度越小增强效果越明显;钝角情况下, SERS对角度 依赖的敏感度下降。
光谱学 表面增强拉曼散射 光刻 数字微镜设备 spectroscopy surface enhance Raman scattering light lithography digital micro-mirror device 
量子电子学报
2017, 34(4): 385
Author Affiliations
Abstract
Department of Optics and Optical Engineering, Anhui Key Laboratory of Optoelectronic Science and Technology, University of Science and Technology of China, Hefei 230026, China
The interference of optically induced electric and magnetic resonances in high-refractive-index dielectric nanoparticles provides a new approach to control and shape the scattering patterns of light in the field of nanophotonics. In this Letter, we spectrally tune the electric and magnetic resonances by varying the geometry of a single isolated lead telluride (PbTe) dielectric nanocube. Then, we overlap the electric dipole resonance and magnetic dipole resonance to suppress backward scattering and enhance forward scattering in the resonance region. Furthermore, a broadband unidirectional scattering is achieved by structuring the dielectric nanocuboids as a trimer antenna.
160.3918 Metamaterials 290.0290 Scattering 050.6624 Subwavelength structures 
Chinese Optics Letters
2016, 14(1): 011601
Author Affiliations
Abstract
Department of Optics and Optical Engineering, Anhui Key Laboratory of Optoelectronic Science and Technology, University of Science and Technology of China, Hefei 230026, China
The nonlocal effect on the spontaneous emission of a silver cuboid dimer is investigated using a local analog model. Magnetic as well as electric dipole excitations are introduced to excite different gap modes. The nonlocal response of electric and magnetic modes on various parameters of gap (width and refractive index) are investigated. Unidirectional radiation is achieved by the interaction between electric and magnetic modes in both local and nonlocal models. Compared to local simulations, the resonant wavelength is blue shifted and the spontaneous emission enhancement is weakened in the nonlocal model. The relative shifts of the resonant wavelengths get larger in smaller gaps with a higher refractive index.
250.5403 Plasmonics 260.2510 Fluorescence 
Chinese Optics Letters
2016, 14(7): 072501

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